 |
 |
Process Specialties was the first company back in 1996 to offer 300mm processing services to Machine Tool and IC processing companies world wide. For the past 27 years we have been delivering quick turn times and reliable high quality confidential 300mm processing services to our clients. In 2023 we continue to be a valuable resource for our clients R & D and service processing needs. In 1997 Process Specialties developed the first production 300mm LPCVD Nitride and Poly Silicon systems. Since then we have processed hundreds of thousands of wafers through our Nitride and Poly Silicon systems. In total since 1996 Process Specialties has successfully processed well over one million 300mm wafers through various operations. Today we offer a myriad of 300mm processing services, including our newest offering of 2um CD Stepped Lithography in 5 um - 10 um thick I-line resist. When it comes to 300mm processing remember, that PSI is the most experienced and trusted company currently offering 300mm wafer processing services on the planet! |
300mm Processes Specifications |
|
DRY THERMAL OXIDE 800-900°C THERMAL OXIDE (H2 O2 Wet Steam) Max 900°C POLYSILICON DEPOSITION 610°C LPCVD NITRIDE DEPOSITION 820°C PVD PURE ALUMINUM PVD ALUMINUM / Cu .5% PVD TITANIUM (Ti) PVD TITANIUM NITRIDE (TiN) PVD TANTALUM (Ta) PVD TANTALUM NITRIDE (TaN) PVD COPPER (Cu) PVD CHROME (Cr) PVD TUNGSTEN (W) WET CLEANING WET PATTERNED ETCHING WET STRIPPING PLASMA STRIPPING / ETCHING PHOTORESIST STRIPPING PROXIMITY PHOTOLITHOGRAPHY (Full Wafer) STEPPED PHOTOLITHOGRAPHY THIN RESIST 1.2um - 1.5um STEPPED PHOTOLITHOGRAPHY THICK RESIST 3um - 10um BLANKET I-LINE PHOTORESIST COATING BLANKET 193 nm DUV PHOTORESIST COATING BLANKET 248nm DUV PHOTORESIST COATING |
40 - 900Å 900 - 25,000Å 1000 - 20,000Å 200 - 3,000Å 1,000 - 20,000Å 1,000 - 20,000Å 200 - 3,000Å 200 - 3,000Å 200 - 3,000Å 200 - 3,000Å 200 - 20,000Å 200 - 2,000Å 200 - 2000Å RCA, SC1 - SC2, Dilute HF Cleaning / Dipping... HF-BOE Oxide etch, Metal Etch, etc. WET STRIP FILMS, OXIDE, NITRIDE POLY / NITRIDE (5um+ Feature Etching) H2SO4 / H202 (PIRANHA), O2 PLASMA ≥4 CD MICRON PSI / CUSTOMER SUPPLIED MASKS ≥1 CD MICRON PSI / CUSTOMER SUPPLIED MASKS ≥2-3 CD MICRON PSI / CUSTOMER SUPPLIED MASKS 1.4 um - 10.0 um Thickness .25 um - .4 um Thickness 1.0um - 3.0um Thickness |
If you are interested in any of the above processing services contact Customer Service at 800.533.8820 for a quotation. If you do not see exactly the 300mm process you are looking for please contact us, as we cannot list all of our services here and we may offer what you need. If we do not offer your custom processing, we may be able to give you a referral to another qualified supplier. |
| CONTACT PSI | © 1996-2023 Process Specialties Inc., all rights reserved |