Process Specialties has been providing reliable high quality wafer processing services to the Semiconductor, MEMS, Medical and Military/Aerospace industries since 1988.

After 35 years of successfully processing millions of 100 - 200mm wafers, we continue to be a consistent and valuable resource for our client's confidential custom processing needs. Below you will find the normal processing we are offering, In addition we also process SOI, Quartz and SiGe wafers, as well as other substrates/objects. Please call PSI customer service at 1-800-533-8820 to discuss your custom processing needs.

Processes                                              Specifications                                              Available Size(s)

DRY THERMAL OXIDE

THERMAL OXIDE

POLYSILICON DEPOSITION

LPCVD NITRIDE DEPOSITION

PVD PURE ALUMINUM

PVD ALUMINUM / Cu .5%

PVD TITANIUM (Ti)

PVD TITANIUM NITRIDE (TiN)

PVD TANTALUM (Ta)

PVD TANTALUM NITRIDE (TaN)

PVD COPPER (Cu)

PVD TUNGSTEN (W)

PVD CHROME (Cr)

WET CLEANING

WET PATTERNED ETCHING

PLASMA STRIPPING / ETCHING

WET STRIPPING

PHOTORESIST STRIPPING

PROXIMITY PHOTOLITHOGRAPHY

STEPPED LITHO 3um - 10um RESIST

STEPPED PHOTOLITHOGRAPHY

PHOTORESIST COATING I-LINE

THICK RESIST COATING I-LINE

PHOTORESIST COATING DUV

PHOTORESIST COATING 193 nm

40 - 900Å

900 - 25,000Å

1000 - 20,000Å

200 - 3,000Å

1,000 - 20,000Å

1,000 - 20,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 3,000Å

200 - 20,000Å

200 - 3,000Å

200 - 2,000Å

RCA, SC1 - SC2, Dilute HF/DI Cleaning

HF-BOE Oxide, Metal Etching, etc.

POLY / NITRIDE  (5um+ Feature Etching)

STRIP FILMS/ OXIDE, NITRIDE

H2SO4 / H202 (PIRANHA), PLASMA

≥5 CD MICRON PSI / CUSTOMER MASKS

≥2-3 CD MICRON PSI / CUSTOMER MASKS

≥.1 CD MICRON PSI / CUSTOMER MASKS

I-LINE POSITIVE RESIST 1.4um - 5um 

I-LINE POSITIVE RESIST 5.5um - 10um 

DUV 248 nm POSITIVE RESIST 1um - 3um

DUV 193 nm POSITIVE RESIST .25 - .4um

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

50, 75, 100, 125, 150 & 200mm

75, 100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

100, 125, 150 & 200mm

200mm only

150mm & 200mm only

150mm & 200mm only

200mm only

200mm only

200mm only

If you are interested in any of the above processing services contact customer service at Process Specialties at 800.533.8820 for a quotation. If you do not see exactly the process you are looking for please contact us, as we cannot list all of our services here. If we do not offer your custom process, perhaps we can give you a referral to another qualified supplier.

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